DSpace at KIST: Investigation of amorphous carbon film deposition by molecular dynamic simulation

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DC Field	Value	Language
dc.contributor.author	이승협	-
dc.contributor.author	이승철	-
dc.contributor.author	이규환	-
dc.contributor.author	이광렬	-
dc.date.accessioned	2024-01-21T09:10:52Z	-
dc.date.available	2024-01-21T09:10:52Z	-
dc.date.created	2022-01-10	-
dc.date.issued	2003-03	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/138759	-
dc.title	Investigation of amorphous carbon film deposition by molecular dynamic simulation	-
dc.title.alternative	분자 동역학 전산모사에 의한 비정질 탄소 필름의 합성거동 연구	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	한국진공학회지, v.v. 12, no.no. 1, pp.25 - 34	-
dc.citation.title	한국진공학회지	-
dc.citation.volume	v. 12	-
dc.citation.number	no. 1	-
dc.citation.startPage	25	-
dc.citation.endPage	34	-
dc.subject.keywordAuthor	다이아몬드상 카본	-

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