Isolated cluster ion impact on solid surfaces HOPG, Si and Cu(TiO2)/Si surfaces

Abstract

Isolated CO2 cluster ion impact on solid surfaces was investigated at the acceleration voltage of 40-60 kV oil highly oriented pyrolytic graphite, Si with native oxide layers, and Cu and TiO2 films deposited on Si wafer respectively. At the low flux (10(7)/cm(2) s) of isolated cluster ion beam impact, hillock was observed on solid surfaces of a few nm height and a few tens-hundreds nm in lateral dimension. After long irradiation on Si and Cu/Si, humping was more developed and consequently the surface seemed to be smoothed due to filling the gap between the hillocks. And prolonged irradiation of CO2 clusters on Cu(TiO2)/Si surfaces and modified surfaces was analyzed by atomic force microscopy. X-ray photoelectron spectroscopy. and Auger electron spectroscopy. The interaction of isolated cluster impact with solid surfaces and run size embossment by cluster ion beam are discussed. (C) 2002 Elsevier Science B.V. All rights reserved.