DSpace at KISTKIST Article2001

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dc.contributor.author이성준-
dc.contributor.author주병권-
dc.contributor.author이윤희-
dc.contributor.author서상희-
dc.contributor.author오명환-
dc.contributor.author김태윤-
dc.contributor.author김철주-
dc.date.accessioned2024-01-21T11:36:45Z-
dc.date.available2024-01-21T11:36:45Z-
dc.date.created2022-01-10-
dc.date.issued2001-11-
dc.identifier.issn0374-4914-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/140048-
dc.publisher한국물리학회-
dc.titleStudies on Formation of the Floating Membrane using SOI Wafer and Application to Fabrication of Thermopile Sensor-
dc.title.alternativeSOI 웨이퍼를 이용한 Floating Membrane 구조 형성 및 Thermopile센서 제작에의 응용-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitation새물리, v.43, pp.S18 - S22-
dc.citation.title새물리-
dc.citation.volume43-
dc.citation.startPageS18-
dc.citation.endPageS22-
dc.description.journalRegisteredClasskci-
dc.description.journalRegisteredClassother-
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KIST Article > 2001
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