DSpace at KISTKIST Article2001

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dc.contributor.author염상섭-
dc.contributor.author박흥우-
dc.contributor.author박윤권-
dc.contributor.author주병권-
dc.contributor.author오영제-
dc.contributor.author이종훈-
dc.contributor.author정문교-
dc.contributor.author서상희-
dc.contributor.author황근창-
dc.date.accessioned2024-01-21T12:34:30Z-
dc.date.available2024-01-21T12:34:30Z-
dc.date.created2022-01-10-
dc.date.issued2001-04-
dc.identifier.issn1225-9381-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/140553-
dc.publisher한국요업학회-
dc.titleMicromachining and fabrication of thin films for MEMS-infrared detectors-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitationKorean Journal of Ceramics, v.7, no.1, pp.36 - 40-
dc.citation.titleKorean Journal of Ceramics-
dc.citation.volume7-
dc.citation.number1-
dc.citation.startPage36-
dc.citation.endPage40-
dc.subject.keywordAuthoruncooled IR sensor-
dc.subject.keywordAuthorMEMS-
dc.subject.keywordAuthorMultilayered thin film-
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KIST Article > 2001
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