DSpace at KIST: The oxidation of Kovar in Humidified N₂/H₂ atmosphere

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DC Field	Value	Language
dc.contributor.author	김병수	-
dc.contributor.author	김민호	-
dc.contributor.author	김상우	-
dc.contributor.author	최덕균	-
dc.contributor.author	손용배	-
dc.date.accessioned	2024-01-21T12:35:43Z	-
dc.date.available	2024-01-21T12:35:43Z	-
dc.date.created	2022-01-10	-
dc.date.issued	2001-04	-
dc.identifier.issn	1226-9360	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/140575	-
dc.publisher	한국마이크로전자 및 패키징학회	-
dc.title	The oxidation of Kovar in Humidified N₂/H₂ atmosphere	-
dc.title.alternative	가습된 N₂/H₂ 혼합가스 분위기에서의 Kovar 산화 거동	-
dc.type	Article	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	마이크로전자 및 패키징학회지 = Journal of Microelectronics and Packaging Society, v.8, no.2, pp.1 - 7	-
dc.citation.title	마이크로전자 및 패키징학회지 = Journal of Microelectronics and Packaging Society	-
dc.citation.volume	8	-
dc.citation.number	2	-
dc.citation.startPage	1	-
dc.citation.endPage	7	-
dc.description.journalRegisteredClass	kci	-
dc.description.journalRegisteredClass	other	-
dc.subject.keywordAuthor	Kovar	-
dc.subject.keywordAuthor	glass-to-metal sealing	-
dc.subject.keywordAuthor	oxidation layer	-

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