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dc.contributor.authorShin, JK-
dc.contributor.authorLee, CS-
dc.contributor.authorLee, KR-
dc.contributor.authorEun, KY-
dc.date.accessioned2024-01-21T13:01:11Z-
dc.date.available2024-01-21T13:01:11Z-
dc.date.created2021-09-05-
dc.date.issued2001-01-29-
dc.identifier.issn0003-6951-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/140768-
dc.description.abstractTetrahedral amorphous carbon (ta-C) films deposited by the filtered vacuum arc process have large compressive residual growth stresses that depend on the atomic-bond structure. We observed that the G peak of the Raman spectrum shifts to higher frequency by 4.1 +/-0.5 cm(-1)/GPa due to the residual compressive stress. This value agrees well with the calculated Raman-peak shift of the graphite plane due to applied stress. By considering the effect of residual stress on the G-peak position, we also observe a similar dependence between the G-peak position and the atomic-bond structure in both ta-C and hydrogenated amorphous carbon (a-C:H) films; namely, that a higher sp(2) bond content shifts the G-peak position to higher frequency. (C) 2001 American Institute of Physics.-
dc.languageEnglish-
dc.publisherAMER INST PHYSICS-
dc.subjectCHEMICAL-VAPOR-DEPOSITION-
dc.subjectSPECTROSCOPY-
dc.subjectARC-
dc.titleEffect of residual stress on the Raman-spectrum analysis of tetrahedral amorphous carbon films-
dc.typeArticle-
dc.identifier.doi10.1063/1.1343840-
dc.description.journalClass1-
dc.identifier.bibliographicCitationAPPLIED PHYSICS LETTERS, v.78, no.5, pp.631 - 633-
dc.citation.titleAPPLIED PHYSICS LETTERS-
dc.citation.volume78-
dc.citation.number5-
dc.citation.startPage631-
dc.citation.endPage633-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.identifier.wosid000166737500024-
dc.identifier.scopusid2-s2.0-0001462280-
dc.relation.journalWebOfScienceCategoryPhysics, Applied-
dc.relation.journalResearchAreaPhysics-
dc.type.docTypeArticle-
dc.subject.keywordPlusCHEMICAL-VAPOR-DEPOSITION-
dc.subject.keywordPlusSPECTROSCOPY-
dc.subject.keywordPlusARC-
dc.subject.keywordAuthorTa-C-
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KIST Article > 2001
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