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dc.contributor.author박세광-
dc.contributor.author김태송-
dc.date.accessioned2024-01-21T13:07:42Z-
dc.date.available2024-01-21T13:07:42Z-
dc.date.created2022-01-10-
dc.date.issued2000-12-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/140881-
dc.titleMEMS 기술을 이용한 감지 및 제어기의 기술동향-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation전기전자학회지, v.49, no.12, pp.10 - 15-
dc.citation.title전기전자학회지-
dc.citation.volume49-
dc.citation.number12-
dc.citation.startPage10-
dc.citation.endPage15-
dc.subject.keywordAuthorMEMS-
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