DSpace at KIST: Residual stress evaluation through improved curvature method by considering plastic deformation effect of substrate in CVD diamond film

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DC Field	Value	Language
dc.contributor.author	정증현	-
dc.contributor.author	김용협	-
dc.contributor.author	백영준	-
dc.contributor.author	권동일	-
dc.date.accessioned	2024-01-21T13:07:49Z	-
dc.date.available	2024-01-21T13:07:49Z	-
dc.date.created	2022-01-10	-
dc.date.issued	2000-12	-
dc.identifier.issn	1738-8228	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/140883	-
dc.publisher	대한금속.재료학회	-
dc.title	Residual stress evaluation through improved curvature method by considering plastic deformation effect of substrate in CVD diamond film	-
dc.title.alternative	Si 기판의 소성변형 효과 보정에 의해 개선된 곡률측정법을 이용한 CVD 다이아몬드 박막의 잔류응력 평가	-
dc.type	Article	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	대한금속 . 재료학회지 = Journal of the Korean Institute of Metals and Materials, v.38, no.12, pp.1675 - 1683	-
dc.citation.title	대한금속 . 재료학회지 = Journal of the Korean Institute of Metals and Materials	-
dc.citation.volume	38	-
dc.citation.number	12	-
dc.citation.startPage	1675	-
dc.citation.endPage	1683	-
dc.subject.keywordAuthor	Diamond film	-
dc.subject.keywordAuthor	Residual stress	-
dc.subject.keywordAuthor	Plastic deformation	-
dc.subject.keywordAuthor	Diamond etching	-
dc.subject.keywordAuthor	Nondiamond phase	-
dc.subject.keywordAuthor	Stress gradient	-

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