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dc.contributor.author박철우-
dc.contributor.author문성욱-
dc.contributor.author오명환-
dc.contributor.author정홍배-
dc.date.accessioned2024-01-21T13:31:45Z-
dc.date.available2024-01-21T13:31:45Z-
dc.date.created2022-01-10-
dc.date.issued2000-10-
dc.identifier.issn1226-7945-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/141057-
dc.publisher한국전기전자재료학회-
dc.titleA study for the characteristics of multi-layer VOx thin films for applying to IR absorbing layer-
dc.title.alternative적외선 흡수층 응용을 위한 다층 산화 바나듐 박막의 특성에 관한 연구-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitation전기전자재료학회논문지, v.13, no.10, pp.859 - 864-
dc.citation.title전기전자재료학회논문지-
dc.citation.volume13-
dc.citation.number10-
dc.citation.startPage859-
dc.citation.endPage864-
dc.subject.keywordAuthorIR(infrared)-
dc.subject.keywordAuthorMEMS-
dc.subject.keywordAuthorMicroelectromechanical System-
dc.subject.keywordAuthorMicrobolometer-
dc.subject.keywordAuthorTCR-
dc.subject.keywordAuthorTemperature coefficient of resistance-
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