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dc.contributor.author채경수-
dc.contributor.author한승오-
dc.contributor.author하종민-
dc.contributor.author문성욱-
dc.contributor.author박정호-
dc.date.accessioned2024-01-21T13:35:40Z-
dc.date.available2024-01-21T13:35:40Z-
dc.date.created2022-01-10-
dc.date.issued2000-09-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/141122-
dc.publisher대한전기학회-
dc.titleDesign and fabrication of a micromechanical switch using polysilicon surface micromachining-
dc.title.alternative다결정실리콘 표면 미세가공 기술을 이용한 초소형 기계식 스위치의 설계 및 제작-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation대한전기학회논문지 : 전기물성,응용부문 C = The Transactions of The Korean Institute of Electrical Engineers, v.49, no.9, pp.546 - 552-
dc.citation.title대한전기학회논문지 : 전기물성,응용부문 C = The Transactions of The Korean Institute of Electrical Engineers-
dc.citation.volume49-
dc.citation.number9-
dc.citation.startPage546-
dc.citation.endPage552-
dc.subject.keywordAuthormechanical switch-
dc.subject.keywordAuthorMEMS-
dc.subject.keywordAuthorLogic Gate-
dc.subject.keywordAuthoractuator-
dc.subject.keywordAuthorsurface micromaching-
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