DSpace at KISTKIST Article2000

Full metadata record

DC Field Value Language
dc.contributor.author이동윤-
dc.contributor.author박용욱-
dc.contributor.author남산-
dc.contributor.author이전국-
dc.contributor.author김현재-
dc.contributor.author윤석진-
dc.contributor.author황금찬-
dc.date.accessioned2024-01-21T13:42:48Z-
dc.date.available2024-01-21T13:42:48Z-
dc.date.created2022-01-10-
dc.date.issued2000-07-
dc.identifier.issn1226-7945-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/141247-
dc.publisher한국전기전자재료학회-
dc.titleA study on C-axis preferred orientation of ZnO thin film at Ar/O2 gas ratios-
dc.title.alternativeAr/O2에 따른 ZnO 박막의 C-축 배향성에 관한 연구-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitation전기전자재료학회논문지, v.13, no.7, pp.617 - 624-
dc.citation.title전기전자재료학회논문지-
dc.citation.volume13-
dc.citation.number7-
dc.citation.startPage617-
dc.citation.endPage624-
dc.subject.keywordAuthorZnO thin film-
dc.subject.keywordAuthorRF magnetron sputtering-
dc.subject.keywordAuthorpreferred orientation-
dc.subject.keywordAuthorresistivity-
dc.subject.keywordAuthorroughness-
dc.subject.keywordAuthorZnO 박막-
dc.subject.keywordAuthor고주파 마그네트론 스퍼터링-
dc.subject.keywordAuthor우선 배향성-
dc.subject.keywordAuthor비저항-
dc.subject.keywordAuthor거칠기-
Appears in Collections:
KIST Article > 2000
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML
Show Simple Item Record

qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE