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dc.contributor.authorYong Jenong Kim-
dc.contributor.authorTae Joon Kim-
dc.contributor.authorTae-Kyung Kim-
dc.contributor.authorByungwoo Park-
dc.contributor.author송종한-
dc.date.accessioned2024-01-21T14:00:58Z-
dc.date.available2024-01-21T14:00:58Z-
dc.date.created2022-01-10-
dc.date.issued2000-06-
dc.identifier.issn1225-8822-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/141311-
dc.languageEnglish-
dc.publisher한국진공학회-
dc.titleActivation energy for the loss of substitutional carbon in Si0.984C0.016 grown by solid phase epitaxy-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국진공학회지, v.4, no.2, pp.50 - 54-
dc.citation.title한국진공학회지-
dc.citation.volume4-
dc.citation.number2-
dc.citation.startPage50-
dc.citation.endPage54-
dc.description.isOpenAccessN-
dc.description.journalRegisteredClassother-
dc.subject.keywordAuthorSPE-
dc.subject.keywordAuthorFTIR-
dc.subject.keywordAuthorHR-XRD-
dc.subject.keywordAuthorsubstitutional carbon-
dc.subject.keywordAuthorRTA-
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KIST Article > 2000
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