DSpace at KIST: 후 열처리에 의한 cubic-BN 상과 hexagonal-BN 상 혼합 막의 안정성 향상

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DC Field	Value	Language
dc.contributor.author	박영준	-
dc.contributor.author	최제형	-
dc.contributor.author	이정용	-
dc.contributor.author	백영준	-
dc.date.accessioned	2024-01-21T14:06:22Z	-
dc.date.available	2024-01-21T14:06:22Z	-
dc.date.created	2022-01-10	-
dc.date.issued	2000-05	-
dc.identifier.issn	2288-6559	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/141406	-
dc.language	Korean	-
dc.publisher	한국진공학회	-
dc.title	후 열처리에 의한 cubic-BN 상과 hexagonal-BN 상 혼합 막의 안정성 향상	-
dc.title.alternative	Stabilization of cubic-BN/hexagonal-BN mixed films by post-annealing	-
dc.type	Article	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	한국진공학회지, v.9, no.2, pp.155 - 161	-
dc.citation.title	한국진공학회지	-
dc.citation.volume	9	-
dc.citation.number	2	-
dc.citation.startPage	155	-
dc.citation.endPage	161	-
dc.description.isOpenAccess	N	-
dc.description.journalRegisteredClass	other	-
dc.subject.keywordAuthor	h-BN	-

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