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후 열처리에 의한 cubic-BN 상과 hexagonal-BN 상 혼합 막의 안정성 향상

Other Titles

Stabilization of cubic-BN/hexagonal-BN mixed films by post-annealing

Authors

박영준; 최제형; 이정용; 백영준

Issue Date

2000-05

Publisher

한국진공학회

Citation

한국진공학회지, v.9, no.2, pp.155 - 161

Keywords

h-BN

ISSN

2288-6559

URI

https://pubs.kist.re.kr/handle/201004/141406

Appears in Collections:

KIST Article > 2000

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