DSpace at KIST: Fabrication of micro-vacuum sensor using surface-macromachined lateral-type field emitter device

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DC Field	Value	Language
dc.contributor.author	박흥우	-
dc.contributor.author	주병권	-
dc.contributor.author	이윤희	-
dc.contributor.author	박정호	-
dc.contributor.author	오명환	-
dc.date.accessioned	2024-01-21T14:07:02Z	-
dc.date.available	2024-01-21T14:07:02Z	-
dc.date.created	2022-01-10	-
dc.date.issued	2000-05	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/141418	-
dc.title	Fabrication of micro-vacuum sensor using surface-macromachined lateral-type field emitter device	-
dc.title.alternative	표면 미세 가공된 측면형 전계 방출 소자를 이용한 초소형 진공 센서의 제작	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	한국센서학회, v.9, no.3, pp.182 - 189	-
dc.citation.title	한국센서학회	-
dc.citation.volume	9	-
dc.citation.number	3	-
dc.citation.startPage	182	-
dc.citation.endPage	189	-
dc.subject.keywordAuthor	MEMS	-

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