Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 윤영수 | - |
dc.date.accessioned | 2024-01-21T14:31:06Z | - |
dc.date.available | 2024-01-21T14:31:06Z | - |
dc.date.created | 2022-01-10 | - |
dc.date.issued | 2000-02 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/141588 | - |
dc.title | 박막제작을 위한 이온빔 스퍼터링 | - |
dc.type | Article | - |
dc.description.journalClass | 3 | - |
dc.identifier.bibliographicCitation | 세라미스트, v.3, no.1, pp.11 - 15 | - |
dc.citation.title | 세라미스트 | - |
dc.citation.volume | 3 | - |
dc.citation.number | 1 | - |
dc.citation.startPage | 11 | - |
dc.citation.endPage | 15 | - |
dc.subject.keywordAuthor | lon beam | - |
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