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dc.contributor.author윤영수-
dc.date.accessioned2024-01-21T14:31:06Z-
dc.date.available2024-01-21T14:31:06Z-
dc.date.created2022-01-10-
dc.date.issued2000-02-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/141588-
dc.title박막제작을 위한 이온빔 스퍼터링-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation세라미스트, v.3, no.1, pp.11 - 15-
dc.citation.title세라미스트-
dc.citation.volume3-
dc.citation.number1-
dc.citation.startPage11-
dc.citation.endPage15-
dc.subject.keywordAuthorlon beam-
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