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박막제작을 위한 이온빔 스퍼터링

Authors

윤영수

Issue Date

2000-02

Citation

세라미스트, v.3, no.1, pp.11 - 15

Keywords

lon beam

URI

https://pubs.kist.re.kr/handle/201004/141588

Appears in Collections:

KIST Article > 2000

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