DSpace at KIST: Si-to-Si electrostatic bonding using LSG film as an interlayer

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DC Field	Value	Language
dc.contributor.author	주병권	-
dc.contributor.author	정지원	-
dc.contributor.author	이덕중	-
dc.contributor.author	이윤희	-
dc.contributor.author	최두진	-
dc.contributor.author	오명환	-
dc.date.accessioned	2024-01-21T15:05:40Z	-
dc.date.available	2024-01-21T15:05:40Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1999-09	-
dc.identifier.issn	0254-4172	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/141934	-
dc.publisher	大韓電氣學會	-
dc.title	Si-to-Si electrostatic bonding using LSG film as an interlayer	-
dc.title.alternative	LSG interlayer를 이용한 실리콘-실리콘 정전 열 접합	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	전기학회논문지 = Transactions of the Korean Institute of Electrical Engneers, v.48C, no.9, pp.672 - 675	-
dc.citation.title	전기학회논문지 = Transactions of the Korean Institute of Electrical Engneers	-
dc.citation.volume	48C	-
dc.citation.number	9	-
dc.citation.startPage	672	-
dc.citation.endPage	675	-
dc.subject.keywordAuthor	FED	-

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