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dc.contributor.author김성화-
dc.contributor.author이광렬-
dc.contributor.author은광용-
dc.date.accessioned2024-01-21T15:09:31Z-
dc.date.available2024-01-21T15:09:31Z-
dc.date.created2022-01-10-
dc.date.issued1999-08-
dc.identifier.issn1225-8822-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/142002-
dc.languageKorean-
dc.publisher한국진공학회-
dc.title이온빔 합성법에 의해 증착된 다이아몬드성 카본 필름의 구조 및 특성-
dc.title.alternativeStructure and properties of ion beam deposited diamond-like carbon films-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국진공학회지, v.8, no.3, pp.346 - 352-
dc.citation.title한국진공학회지-
dc.citation.volume8-
dc.citation.number3-
dc.citation.startPage346-
dc.citation.endPage352-
dc.description.isOpenAccessN-
dc.description.journalRegisteredClassother-
dc.subject.keywordAuthorDLC-
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