Memory window of highly c-axis oriented ferroelectric YMnO3 thin films

Authors
Lee, HNKim, YTPark, YK
Issue Date
1999-06-21
Publisher
AMER INST PHYSICS
Citation
APPLIED PHYSICS LETTERS, v.74, no.25, pp.3887 - 3889
Abstract
YMnO3 thin films have been sputtered with different O-2 partial pressures from 0% to 20%. Only the YMnO3 sputtered without O-2 can be crystallized along (001) c-axis orientation after annealing at 870 degrees C. Mixing 10%-20% O-2 partial pressure in the sputtering ambient, the excess Y2O3 in the YMnO3 films suppresses the c-axis oriented crystallization. Effects of crystallization on the ferroelectric properties of Pt/YMnO3/Y2O3/Si (MEFIS) and Pt/YMnO3/Si (MFS) gate capacitors have been investigated. The memory window of the MEFIS capacitor is enhanced by the c-axis oriented crystallization of the YMnO3. (C) 1999 American Institute of Physics. [S0003-6951(99)01925-7].
Keywords
memory window; MEFIS; MFS; c-axis; YMnO3
ISSN
0003-6951
URI
https://pubs.kist.re.kr/handle/201004/142116
DOI
10.1063/1.124213
Appears in Collections:
KIST Article > Others
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