DSpace at KIST: Metal(Ti, Nb) coating and silicidization of Si-tip for field emitter applications

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DC Field	Value	Language
dc.contributor.author	주병권	-
dc.contributor.author	박재석	-
dc.contributor.author	윤재형	-
dc.contributor.author	김경욱	-
dc.contributor.author	강문식	-
dc.contributor.author	백경갑	-
dc.contributor.author	장진	-
dc.contributor.author	차균현	-
dc.contributor.author	오명환	-
dc.date.accessioned	2024-01-21T15:39:47Z	-
dc.date.available	2024-01-21T15:39:47Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1999-04	-
dc.identifier.issn	1226-7945	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/142297	-
dc.publisher	한국전기전자재료학회	-
dc.title	Metal(Ti, Nb) coating and silicidization of Si-tip for field emitter applications	-
dc.title.alternative	전계 방출 소자용 실리콘 팁에 대한 금속 박막 (Ti, Nb) 코팅 및 실리사이드화	-
dc.type	Article	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	전기전자재료학회논문지, v.12, no.4, pp.291 - 297	-
dc.citation.title	전기전자재료학회논문지	-
dc.citation.volume	12	-
dc.citation.number	4	-
dc.citation.startPage	291	-
dc.citation.endPage	297	-
dc.subject.keywordAuthor	Si-tip array	-
dc.subject.keywordAuthor	Ti and Nb coating	-
dc.subject.keywordAuthor	silicidization	-
dc.subject.keywordAuthor	field emission performance	-
dc.subject.keywordAuthor	실리콘 팁	-
dc.subject.keywordAuthor	티타늄 및 니오비움 코팅	-
dc.subject.keywordAuthor	실리사이드화	-
dc.subject.keywordAuthor	전계 방출 성능	-

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