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dc.contributor.authorChoi, WK-
dc.contributor.authorChoi, SC-
dc.contributor.authorJung, HJ-
dc.contributor.authorKoh, SK-
dc.date.accessioned2024-01-21T16:11:28Z-
dc.date.available2024-01-21T16:11:28Z-
dc.date.created2021-09-03-
dc.date.issued1999-01-
dc.identifier.issn0168-583X-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/142605-
dc.description.abstractNew functional complexes such as AlON and SiON were successfully formed by keV Ar+ ion irradiation with concurrent reactive pas blowing near the irradiated AlN and Si3N4 ceramic surfaces. Single crystal Al2O3 was also treated by only Nt bombardment. At energies higher than 500 eV, AlON bonding arose, while AlN bonds were formed at 1 keV irradiation. (C) 1999 Elsevier Science B.V. All rights reserved.-
dc.languageEnglish-
dc.publisherELSEVIER SCIENCE BV-
dc.subjectENERGY AR+ ION-
dc.subjectOXYGEN ENVIRONMENT-
dc.subjectPOLYCARBONATE-
dc.subjectADHESION-
dc.subjectPOLYTETRAFLUOROETHYLENE-
dc.subjectALUMINUM-
dc.titleCeramic surface modification by a keV ion irradiation-
dc.typeArticle-
dc.identifier.doi10.1016/S0168-583X(98)00848-9-
dc.description.journalClass1-
dc.identifier.bibliographicCitationNUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, v.148, no.1-4, pp.740 - 744-
dc.citation.titleNUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS-
dc.citation.volume148-
dc.citation.number1-4-
dc.citation.startPage740-
dc.citation.endPage744-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.identifier.wosid000078575700139-
dc.identifier.scopusid2-s2.0-0033513827-
dc.relation.journalWebOfScienceCategoryInstruments & Instrumentation-
dc.relation.journalWebOfScienceCategoryNuclear Science & Technology-
dc.relation.journalWebOfScienceCategoryPhysics, Atomic, Molecular & Chemical-
dc.relation.journalWebOfScienceCategoryPhysics, Nuclear-
dc.relation.journalResearchAreaInstruments & Instrumentation-
dc.relation.journalResearchAreaNuclear Science & Technology-
dc.relation.journalResearchAreaPhysics-
dc.type.docTypeArticle; Proceedings Paper-
dc.subject.keywordPlusENERGY AR+ ION-
dc.subject.keywordPlusOXYGEN ENVIRONMENT-
dc.subject.keywordPlusPOLYCARBONATE-
dc.subject.keywordPlusADHESION-
dc.subject.keywordPlusPOLYTETRAFLUOROETHYLENE-
dc.subject.keywordPlusALUMINUM-
dc.subject.keywordAuthorkeV ion beam-
dc.subject.keywordAuthormetal film adhesion-
dc.subject.keywordAuthorfunctional layer-
dc.subject.keywordAuthorceramic surface modification-
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