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dc.contributor.author박용욱-
dc.contributor.author윤석진-
dc.contributor.author최지원-
dc.contributor.author김현재-
dc.contributor.author정형진-
dc.contributor.author박창엽-
dc.date.accessioned2024-01-21T16:37:55Z-
dc.date.available2024-01-21T16:37:55Z-
dc.date.created2022-01-10-
dc.date.issued1998-10-
dc.identifier.issn1229-7607-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/142823-
dc.publisher한국전기전자재료학회-
dc.titleCharacteristics of ZnO/Glass thin films prepared by RF magnetron sputtering-
dc.title.alternativeRF 마그네트론 반응성 스퍼터링으로 제작된 ZnO/Glass 박막 특성-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitationTEEM (한국전기전자재료학회), v.11, no.10, pp.833 - 841-
dc.citation.titleTEEM (한국전기전자재료학회)-
dc.citation.volume11-
dc.citation.number10-
dc.citation.startPage833-
dc.citation.endPage841-
dc.subject.keywordAuthorZnO thin film-
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