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dc.contributor.authorJung, JH-
dc.contributor.authorJu, BK-
dc.contributor.authorKim, H-
dc.contributor.authorLee, YH-
dc.contributor.authorChung, SJ-
dc.contributor.authorJang, J-
dc.contributor.authorOh, MH-
dc.date.accessioned2024-01-21T16:39:12Z-
dc.date.available2024-01-21T16:39:12Z-
dc.date.created2021-09-03-
dc.date.issued1998-10-
dc.identifier.issn0018-9383-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/142845-
dc.description.abstractWe have studied the electron emission characteristics of Mo field emitter arrays (FEA's) using a diamond-like carbon (DLC) film deposited by a layer-by-layer technique using plasma enhanced chemical vapor deposition. The turn-on voltage was lowered from 55 to 30 V by a 20-nm thick hydrogen-free DLC coating and maximum emission current was increased from 166 to 831 mu A. Also the gate voltage required to get the anode current of 0.1 (mu A/emitter) decreases from 77 to 48 V. Furthermore, the emission current from DLC coated Mo FEA's is more stable than that of noncoated Mo FEA's.-
dc.languageEnglish-
dc.publisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC-
dc.subjectCHEMICAL-VAPOR-DEPOSITION-
dc.subjectFILM-
dc.subjectTIPS-
dc.titleEffect of diamond-like carbon coating on the emission characteristics of molybdenum field emitter arrays-
dc.typeArticle-
dc.description.journalClass1-
dc.identifier.bibliographicCitationIEEE TRANSACTIONS ON ELECTRON DEVICES, v.45, no.10, pp.2232 - 2237-
dc.citation.titleIEEE TRANSACTIONS ON ELECTRON DEVICES-
dc.citation.volume45-
dc.citation.number10-
dc.citation.startPage2232-
dc.citation.endPage2237-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.identifier.wosid000076221300019-
dc.identifier.scopusid2-s2.0-0032186897-
dc.relation.journalWebOfScienceCategoryEngineering, Electrical & Electronic-
dc.relation.journalWebOfScienceCategoryPhysics, Applied-
dc.relation.journalResearchAreaEngineering-
dc.relation.journalResearchAreaPhysics-
dc.type.docTypeArticle-
dc.subject.keywordPlusCHEMICAL-VAPOR-DEPOSITION-
dc.subject.keywordPlusFILM-
dc.subject.keywordPlusTIPS-
dc.subject.keywordAuthoremission current-
dc.subject.keywordAuthoremission stability-
dc.subject.keywordAuthorhydrogen-free DLC-
dc.subject.keywordAuthorMo FEA&apos-
dc.subject.keywordAuthors PECVD-
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