Patterned diamond microcolumns for field emitter

Abstract

We have fabricated an array of diamond microcolumns on a silicon substrate using the following process: Fine diamond crystallites were mixed in acetone and seeded on a silicon wafer using an ultrasonic shaker. A silicon oxide film was deposited on the silicon substrate, and an array of holes was formed in the oxide film by back-etching until the diamond-seeded substrate was exposed, Diamond was grown using chemical vapor deposition. Diamond grains grew from the diamond-seeded substrate and filled the holes in the oxide layer, resulting in the formation of an array of diamond microcolumns. (C) 1998 Elsevier Science B.V. All rights reserved.