Full metadata record

DC Field Value Language
dc.contributor.author신동운-
dc.contributor.author최두진-
dc.contributor.author김긍호-
dc.date.accessioned2024-01-21T17:37:28Z-
dc.date.available2024-01-21T17:37:28Z-
dc.date.created2022-01-10-
dc.date.issued1998-01-
dc.identifier.issn1229-7801-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/143358-
dc.publisher한국세라믹학회-
dc.titleProcessing and characterization of a direct bonded SOI using SiO//2 Thin Film-
dc.title.alternativeSiO//2 박막을 이용한 SOI 직접접합공정 및 특성-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국세라믹학회지 = Journal of the Korean Ceramic Society, v.35, no.6, pp.535 - 542-
dc.citation.title한국세라믹학회지 = Journal of the Korean Ceramic Society-
dc.citation.volume35-
dc.citation.number6-
dc.citation.startPage535-
dc.citation.endPage542-
dc.subject.keywordAuthorSOI(Silicon on Insulator)-
Appears in Collections:
KIST Article > Others
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML

qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE