Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 신동운 | - |
dc.contributor.author | 최두진 | - |
dc.contributor.author | 김긍호 | - |
dc.date.accessioned | 2024-01-21T17:37:28Z | - |
dc.date.available | 2024-01-21T17:37:28Z | - |
dc.date.created | 2022-01-10 | - |
dc.date.issued | 1998-01 | - |
dc.identifier.issn | 1229-7801 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/143358 | - |
dc.publisher | 한국세라믹학회 | - |
dc.title | Processing and characterization of a direct bonded SOI using SiO//2 Thin Film | - |
dc.title.alternative | SiO//2 박막을 이용한 SOI 직접접합공정 및 특성 | - |
dc.type | Article | - |
dc.description.journalClass | 2 | - |
dc.identifier.bibliographicCitation | 한국세라믹학회지 = Journal of the Korean Ceramic Society, v.35, no.6, pp.535 - 542 | - |
dc.citation.title | 한국세라믹학회지 = Journal of the Korean Ceramic Society | - |
dc.citation.volume | 35 | - |
dc.citation.number | 6 | - |
dc.citation.startPage | 535 | - |
dc.citation.endPage | 542 | - |
dc.subject.keywordAuthor | SOI(Silicon on Insulator) | - |
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