DSpace at KIST: Si-Si electrostatic bonding using electron beam-evaporated corning #7740 as an interlayer

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DC Field	Value	Language
dc.contributor.author	주병권	-
dc.contributor.author	최우범	-
dc.contributor.author	이윤희	-
dc.contributor.author	정성재	-
dc.contributor.author	이남양	-
dc.contributor.author	성만영	-
dc.contributor.author	오명환	-
dc.date.accessioned	2024-01-21T18:03:15Z	-
dc.date.available	2024-01-21T18:03:15Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1997-10	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/143571	-
dc.title	Si-Si electrostatic bonding using electron beam-evaporated corning #7740 as an interlayer	-
dc.title.alternative	전자선 증착된 Corning #7740 interlayer를 이용한 실리콘-실리콘 정전 열 접합	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	전기학회논문지, v.46, no.10, pp.1562 - 1572	-
dc.citation.title	전기학회논문지	-
dc.citation.volume	46	-
dc.citation.number	10	-
dc.citation.startPage	1562	-
dc.citation.endPage	1572	-
dc.subject.keywordAuthor	MEMS	-
dc.subject.keywordAuthor	wafer bonding	-
dc.subject.keywordAuthor	interlayer	-
dc.subject.keywordAuthor	electrostatic bonding	-
dc.subject.keywordAuthor	Si-Si bonding	-
dc.subject.keywordAuthor	electron beam-evaporated #7740 interlayer	-

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