DSpace at KIST: Spectro-Ellipsometric Studies of Diamond-like Carbon Films Deposited by the Plasma Decomposition of Hydrocarbons

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DC Field	Value	Language
dc.contributor.author	이성규	-
dc.contributor.author	이순일	-
dc.contributor.author	Soo-Ghee Oh	-
dc.contributor.author	이광렬	-
dc.date.accessioned	2024-01-21T19:12:08Z	-
dc.date.available	2024-01-21T19:12:08Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1996-10	-
dc.identifier.issn	1225-8024	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/144277	-
dc.language	English	-
dc.publisher	한국표면공학회	-
dc.title	Spectro-Ellipsometric Studies of Diamond-like Carbon Films Deposited by the Plasma Decomposition of Hydrocarbons	-
dc.type	Article	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	한국표면공학회지, v.29, no.5, pp.532 - 539	-
dc.citation.title	한국표면공학회지	-
dc.citation.volume	29	-
dc.citation.number	5	-
dc.citation.startPage	532	-
dc.citation.endPage	539	-
dc.description.isOpenAccess	N	-
dc.description.journalRegisteredClass	kci	-
dc.subject.keywordAuthor	박막	-

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