DSpace at KIST: Micropattern generation by holographic lithography and fabrication of quantum wire array by MOCVD.

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DC Field	Value	Language
dc.contributor.author	임현식	-
dc.contributor.author	김용	-
dc.contributor.author	김무성	-
dc.contributor.author	민석기	-
dc.contributor.author	김태근	-
dc.contributor.author	조성우	-
dc.contributor.author	박정호	-
dc.date.accessioned	2024-01-21T19:44:30Z	-
dc.date.available	2024-01-21T19:44:30Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1996-01	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/144595	-
dc.title	Micropattern generation by holographic lithography and fabrication of quantum wire array by MOCVD.	-
dc.title.alternative	홀로그래픽 리소그래피에 의한 미세패턴 형성과 MOCVD 에 의한 양자세선 어레이의 제작 =	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	대한전자공학회 논문지, v.v. 33, no.no. 6, pp.222 - ?	-
dc.citation.title	대한전자공학회 논문지	-
dc.citation.volume	v. 33	-
dc.citation.number	no. 6	-
dc.citation.startPage	222	-
dc.citation.endPage	?	-
dc.subject.keywordAuthor	MOCVD	-

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