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dc.contributor.author정형진-
dc.contributor.author고석근-
dc.contributor.author윤영수-
dc.contributor.author김기환-
dc.contributor.author김규철-
dc.contributor.author박태영-
dc.contributor.author이규왕-
dc.contributor.author박석진-
dc.date.accessioned2024-01-21T20:31:34Z-
dc.date.available2024-01-21T20:31:34Z-
dc.date.created2022-01-10-
dc.date.issued1995-11-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/144928-
dc.title이온 클러스터빔 증착법을 이용하여 증착된 구리박막의 특성 .-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation응용물리 ( 한국물리학회지 ), v.v. 8, no.no. 6, pp.616 - 623-
dc.citation.title응용물리 ( 한국물리학회지 )-
dc.citation.volumev. 8-
dc.citation.numberno. 6-
dc.citation.startPage616-
dc.citation.endPage623-
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