NEW METHOD TO PREDICT CORROSION CHARACTERISTICS OF ZN-METALLIZED THIN-FILMS FOR FILM CAPACITORS

Abstract

The relationship between the microstructural parameters, e.g., grain size and preferred orientation, and the corrosion characteristics of Zn-metallized thin films was investigated. The Zn-metallized thin films with various grain sizes and preferred orientations were prepared by changing evaporation conditions, e.g., the temperature of the Zn source and the substrate temperature. By increasing the temperature of the Zn source and decreasing the substrate temperature, the grain size and the values of full width half-maximum (FWHM) of the (002) x-ray diffraction peaks of Zn decreased. From measurements of resistivity change in the thin films a function of time at the temperature of 40 degrees C and the relative humidity of 80%, it was found that the relative change in the value of Omega/sq decreased by decreasing the grain size and the FWHM values of the (002) peaks of Zn. Tt suggests that the FWHM measurement of the (002) peak of Zn is a simple method by which to predict the corrosion characteristics of Zn-metallized thin films. (C) 1995 American Vacuum Society.