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매사 (mesa)가 형성된 GaAs 기판위에 MOCVD로 성장시킨 AlGaAs/GaAs 다층박막의 결정면 성장거동의 온도의존성

Authors

김용; 박양근; 이민석; 김무성; 박용주; 김성일; 민석기; 박만장

Issue Date

1995-03

Citation

응용물리, v.v. 8, no.no. 2, pp.115 - 122

Keywords

MOCVD

URI

https://pubs.kist.re.kr/handle/201004/145149

Appears in Collections:

KIST Article > Others

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