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dc.contributor.author박경현-
dc.contributor.author김태근-
dc.contributor.author박정호-
dc.contributor.author김무성-
dc.contributor.author민석기-
dc.contributor.author이주희-
dc.date.accessioned2024-01-21T21:08:44Z-
dc.date.available2024-01-21T21:08:44Z-
dc.date.created2022-01-10-
dc.date.issued1995-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/145325-
dc.title홀로그래픽 리소그래픽 시스템의 제작 및 미세구조 형성 연구 .-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation응용물리, v.v. 8, pp.556 - 561-
dc.citation.title응용물리-
dc.citation.volumev. 8-
dc.citation.startPage556-
dc.citation.endPage561-
dc.subject.keywordAuthor홀로그래픽 리소그래픽-
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