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dc.contributor.author이재갑-
dc.contributor.author이욱성-
dc.contributor.author백영준-
dc.contributor.author은광용-
dc.date.accessioned2024-01-21T21:42:57Z-
dc.date.available2024-01-21T21:42:57Z-
dc.date.created2022-01-10-
dc.date.issued1994-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/145669-
dc.languageKorean-
dc.publisher대한금속학회-
dc.titleDC PACVD법에 의한 다이아몬드막의 합성-
dc.title.alternativeSynthesis of diamond film using DC PACVD-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitation대한금속학회지, v.32, no.6, pp.742 - 750-
dc.citation.title대한금속학회지-
dc.citation.volume32-
dc.citation.number6-
dc.citation.startPage742-
dc.citation.endPage750-
dc.description.isOpenAccessN-
dc.description.journalRegisteredClassother-
dc.subject.keywordAuthordiamond-
dc.subject.keywordAuthorDC PACVD-
dc.subject.keywordAuthorquality-
dc.subject.keywordAuthorgrowth rate-
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