DSpace at KIST: A nucleation process and the characteristics of Cu metal films in ionized cluster beam deposition

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DC Field	Value	Language
dc.contributor.author	고석근	-
dc.contributor.author	이지연	-
dc.contributor.author	김철호	-
dc.contributor.author	정형진	-
dc.date.accessioned	2024-01-21T22:03:38Z	-
dc.date.available	2024-01-21T22:03:38Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1994-01	-
dc.identifier.issn	0374-4914	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/145789	-
dc.publisher	한국물리학회	-
dc.title	A nucleation process and the characteristics of Cu metal films in ionized cluster beam deposition	-
dc.title.alternative	이온 클러스터 빔 (ionized cluster beam) 증착에서의 구리 금속의 핵 형성과 박막 특성	-
dc.type	Article	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	새물리, v.34, no.6, pp.713 - 720	-
dc.citation.title	새물리	-
dc.citation.volume	34	-
dc.citation.number	6	-
dc.citation.startPage	713	-
dc.citation.endPage	720	-
dc.subject.keywordAuthor	구리	-
dc.subject.keywordAuthor	이온 클러스터 빔	-
dc.subject.keywordAuthor	박막	-

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