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dc.contributor.author배귀남-
dc.contributor.author박승오-
dc.contributor.author이춘식-
dc.contributor.author안이기-
dc.date.accessioned2024-01-21T22:08:23Z-
dc.date.available2024-01-21T22:08:23Z-
dc.date.created2022-01-10-
dc.date.issued1994-01-
dc.identifier.issn1226-4873-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/145869-
dc.languageKorean-
dc.publisher대한기계학회-
dc.title열영동력이 수평 웨이퍼상의 입자침착에 미치는 영향-
dc.title.alternativeThermophoretic effect on particle deposition toward a horizontal wafer-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitation대한기계학회논문집 A, v.18, pp.175 - 183-
dc.citation.title대한기계학회논문집 A-
dc.citation.volume18-
dc.citation.startPage175-
dc.citation.endPage183-
dc.description.isOpenAccessN-
dc.description.journalRegisteredClassother-
dc.subject.keywordAuthorparticle deposition velocity-
dc.subject.keywordAuthor입자침착속도-
dc.subject.keywordAuthorthermophoresis-
dc.subject.keywordAuthor열영동-
dc.subject.keywordAuthorhorizontal wafer-
dc.subject.keywordAuthor수평 웨이터-
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