SYNTHESIS OF CRYSTALLINE POLYIMIDE FILM BY IONIZED CLUSTER-BEAM DEPOSITION

Abstract

Polyimide thin films were deposited by the ionized cluster-beam deposition technique. Imidization and crystallization of polyimide films were investigated using transmission electron microscopy and Fourier transform infrared spectroscopy. Polyimide films deposited under optimum conditions showed a maximum imidization and good crystal structure, which is superior to that of films fabricated by other techniques.