DSpace at KIST: Patterning of Y-Ba-Cu-O thin films by reactive ion etching (RIE).

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DC Field	Value	Language
dc.contributor.author	한택상	-
dc.contributor.author	최상삼	-
dc.contributor.author	김영환	-
dc.contributor.author	박종혁	-
dc.date.accessioned	2024-01-21T22:41:41Z	-
dc.date.available	2024-01-21T22:41:41Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1993-01	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/146195	-
dc.title	Patterning of Y-Ba-Cu-O thin films by reactive ion etching (RIE).	-
dc.title.alternative	활성이온식각법에 의한 Y-Ba-Cu-O 고온초전도 박막의 미세선 제작 =	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	한국재료학회지 = Korean journal of materials research., v.제 3 권, pp.151 - 157	-
dc.citation.title	한국재료학회지 = Korean journal of materials research.	-
dc.citation.volume	제 3 권	-
dc.citation.startPage	151	-
dc.citation.endPage	157	-
dc.subject.keywordAuthor	Y-Ba-Cu-O 고온초전도 박막	-
dc.subject.keywordAuthor	활성이온식각법	-
dc.subject.keywordAuthor	임계온도	-
dc.subject.keywordAuthor	임계전류	-

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