DSpace at KIST: FAST SOLID-PHASE CRYSTALLIZATION OF AMORPHOUS-SILICON FILMS ON GLASS USING LOW-TEMPERATURE MULTISTEP RAPID THERMAL ANNEALING

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DC Field	Value	Language
dc.contributor.author	이창우	-
dc.contributor.author	이주천	-
dc.contributor.author	김용태	-
dc.date.accessioned	2024-01-21T22:44:07Z	-
dc.date.available	2024-01-21T22:44:07Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1993-01	-
dc.identifier.issn	0721-7250	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/146236	-
dc.language	English	-
dc.publisher	Springer Verlag	-
dc.title	FAST SOLID-PHASE CRYSTALLIZATION OF AMORPHOUS-SILICON FILMS ON GLASS USING LOW-TEMPERATURE MULTISTEP RAPID THERMAL ANNEALING	-
dc.type	Article	-
dc.identifier.doi	10.1007/BF00517678	-
dc.description.journalClass	1	-
dc.identifier.bibliographicCitation	Applied Physics A: Solids and Surfaces, v.56, no.2, pp.2718 - 2721	-
dc.citation.title	Applied Physics A: Solids and Surfaces	-
dc.citation.volume	56	-
dc.citation.number	2	-
dc.citation.startPage	2718	-
dc.citation.endPage	2721	-
dc.description.isOpenAccess	N	-
dc.description.journalRegisteredClass	scopus	-
dc.identifier.wosid	A1993KH89800006	-

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