PECVD 법으로 형성한 W//6//7N//3//3/GaAs 구조의 열적 특성 .

Authors
김용태민석기홍종성이세정이창우이종무
Issue Date
1993-01
Citation
한국재료학회지, v.v. 3, pp.443 - 450
URI
https://pubs.kist.re.kr/handle/201004/146239
Appears in Collections:
KIST Article > Others
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