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dc.contributor.author주병권-
dc.contributor.author오명환-
dc.date.accessioned2024-01-21T23:06:38Z-
dc.date.available2024-01-21T23:06:38Z-
dc.date.created2022-01-10-
dc.date.issued1992-09-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/146389-
dc.title실리콘을 이용한 압력센서-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation전자부품지, pp.160 - 160-
dc.citation.title전자부품지-
dc.citation.startPage160-
dc.citation.endPage160-
dc.subject.keywordAuthorMEMS-
dc.subject.keywordAuthormicromachining-
dc.subject.keywordAuthormicrosensor-
dc.subject.keywordAuthorpressure sensor-
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