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Plasma polymerization of organosilicon compounds. 3. Overall kinetics of plasma polymer deposition.

Authors

김낙중; 김은영; 홍성일; Hiroyuki Sasabe; 박수영

Issue Date

1992-01

Citation

폴리머 = Polymer, v.v. 16, no.no. 3, pp.260 - ?

Keywords

plasma polymerization; plasma deposition; glow discharge; organosilicon

URI

https://pubs.kist.re.kr/handle/201004/146610

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KIST Article > Others

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