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dc.contributor.author조원일-
dc.contributor.author이철환-
dc.contributor.author신치범-
dc.contributor.author윤경석-
dc.contributor.author주재백-
dc.date.accessioned2024-01-21T23:35:44Z-
dc.date.available2024-01-21T23:35:44Z-
dc.date.created2022-01-10-
dc.date.issued1992-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/146652-
dc.titleCharacteristics of Pd-MIS devices on hydrogen gas sensing.-
dc.title.alternativePd-MIS 소자의 수소가스 검지 특성 =-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation수소에너지 =, v.v. 3, no.no. 2, pp.17 - 24-
dc.citation.title수소에너지 =-
dc.citation.volumev. 3-
dc.citation.numberno. 2-
dc.citation.startPage17-
dc.citation.endPage24-
dc.subject.keywordAuthormetal/insulator/semiconductor-
dc.subject.keywordAuthorp-type silicon-
dc.subject.keywordAuthorsilicon oxide-
dc.subject.keywordAuthorhydrogen-
dc.subject.keywordAuthorresponse time-
dc.subject.keywordAuthorregeneration time-
dc.subject.keywordAuthorvoltage shift-
dc.subject.keywordAuthorpalladium-
dc.subject.keywordAuthorsurface coverage-
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