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dc.contributor.authorLEE, JI-
dc.contributor.authorKANG, KN-
dc.contributor.authorBAGLIO, JA-
dc.contributor.authorLIM, HJ-
dc.contributor.authorPARK, HL-
dc.date.accessioned2024-01-21T23:40:47Z-
dc.date.available2024-01-21T23:40:47Z-
dc.date.created2022-01-11-
dc.date.issued1991-09-01-
dc.identifier.issn0261-8028-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/146735-
dc.languageEnglish-
dc.publisherCHAPMAN HALL LTD-
dc.subjectTHERMAL-OXIDATION-
dc.subjectOXIDES-
dc.subjectINTERFACE-
dc.subjectBAND-
dc.titleREMOTE PLASMA-ASSISTED OXIDATION OF INP-
dc.typeArticle-
dc.identifier.doi10.1007/BF00721839-
dc.description.journalClass1-
dc.identifier.bibliographicCitationJOURNAL OF MATERIALS SCIENCE LETTERS, v.10, no.17, pp.1043 - 1045-
dc.citation.titleJOURNAL OF MATERIALS SCIENCE LETTERS-
dc.citation.volume10-
dc.citation.number17-
dc.citation.startPage1043-
dc.citation.endPage1045-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.identifier.wosidA1991GE99900019-
dc.identifier.scopusid2-s2.0-34249926757-
dc.relation.journalWebOfScienceCategoryMaterials Science, Multidisciplinary-
dc.relation.journalResearchAreaMaterials Science-
dc.type.docTypeArticle-
dc.subject.keywordPlusTHERMAL-OXIDATION-
dc.subject.keywordPlusOXIDES-
dc.subject.keywordPlusINTERFACE-
dc.subject.keywordPlusBAND-
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