Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김용태 | - |
| dc.contributor.author | 김진흥 | - |
| dc.contributor.author | 남철우 | - |
| dc.contributor.author | 우성일 | - |
| dc.date.accessioned | 2024-01-22T00:34:36Z | - |
| dc.date.available | 2024-01-22T00:34:36Z | - |
| dc.date.created | 2022-01-10 | - |
| dc.date.issued | 1990-01 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/147181 | - |
| dc.title | PECVD 비정질 실리콘박막의 증착공정에 대한 이론적모델 및 실험결과 . | - |
| dc.type | Article | - |
| dc.description.journalClass | 3 | - |
| dc.identifier.bibliographicCitation | 전자공학회논문지, v.v. 27, pp.68 - 77 | - |
| dc.citation.title | 전자공학회논문지 | - |
| dc.citation.volume | v. 27 | - |
| dc.citation.startPage | 68 | - |
| dc.citation.endPage | 77 | - |
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