Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 주병권 | - |
| dc.contributor.author | 김형곤 | - |
| dc.contributor.author | 오명환 | - |
| dc.date.accessioned | 2024-01-22T00:41:24Z | - |
| dc.date.available | 2024-01-22T00:41:24Z | - |
| dc.date.created | 2022-01-10 | - |
| dc.date.issued | 1989-12 | - |
| dc.identifier.issn | 1016-9288 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/147293 | - |
| dc.publisher | 대한전자공학회 | - |
| dc.title | 실리콘 Thermopile 집적센서의 기술동향 | - |
| dc.type | Article | - |
| dc.description.journalClass | 3 | - |
| dc.identifier.bibliographicCitation | 전자공학회지, v.16, no.6, pp.546 - 555 | - |
| dc.citation.title | 전자공학회지 | - |
| dc.citation.volume | 16 | - |
| dc.citation.number | 6 | - |
| dc.citation.startPage | 546 | - |
| dc.citation.endPage | 555 | - |
| dc.subject.keywordAuthor | MEMS | - |
| dc.subject.keywordAuthor | micromachining | - |
| dc.subject.keywordAuthor | microsensor | - |
| dc.subject.keywordAuthor | thermopile sensor | - |
| dc.subject.keywordAuthor | sensor | - |
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