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dc.contributor.authorJu Byeong Kwon-
dc.contributor.authorOH MYUNG HWAN-
dc.date.accessioned2024-02-21T05:05:37Z-
dc.date.available2024-02-21T05:05:37Z-
dc.date.issued1996-05-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/148810-
dc.subjectMEMS-
dc.titleFED 기술 강좌 : 진공 마이크로 일렉트로직스 (I)-
dc.typeBook-
dc.citation.startPage?-
dc.citation.endPage?-
dc.relation.isPartOfSeries전자부품지-
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