Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Park Young Ju | - |
| dc.contributor.author | K. Ozasa | - |
| dc.contributor.author | Y. Aoyagi | - |
| dc.date.accessioned | 2024-02-21T05:07:12Z | - |
| dc.date.available | 2024-02-21T05:07:12Z | - |
| dc.date.issued | 1995-02 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/148847 | - |
| dc.subject | SP-CBE | - |
| dc.title | プラズマパスの발생とそれを용いた반도체표면반응の제어 | - |
| dc.title.alternative | Creation of high-peak plasma-pulses and control of surface reaction in short-pulsed chemical beam epitaxy. | - |
| dc.type | Book | - |
| dc.citation.startPage | 11 | - |
| dc.citation.endPage | 14 | - |
| dc.relation.isPartOfSeries | 이연シンポジウム제4회반응제어による표면가공기술 | - |
- Appears in Collections:
- KIST Publication > Others
- Files in This Item:
There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.
KIST 리포지터리는 국립중앙도서관 OAK 보급사업으로 구축되었습니다.