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dc.contributor.authorKim Yong Tae-
dc.contributor.authorS. J. Lee-
dc.contributor.authorC. S. Kwon-
dc.contributor.authorY. W. Park-
dc.contributor.authorC. C. Lee-
dc.contributor.authorC. W. Lee-
dc.contributor.authorMin Suk-Ki-
dc.date.accessioned2024-02-21T05:12:39Z-
dc.date.available2024-02-21T05:12:39Z-
dc.date.issued1993-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/148972-
dc.titleEffects of nitrogen on the stress of plasma deposited tungsten and tungsten nitride thin films.-
dc.title.alternativeEffects of nitrogen on the stress of plasma deposited tungsten and tungsten nitride thin films.-
dc.typeBook-
dc.citation.startPage?-
dc.citation.endPage?-
dc.relation.isPartOfSeries한국물리학회 제 67 회 학술논문 발표회-
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