Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim Yong Tae | - |
dc.contributor.author | C. S. Kwon | - |
dc.contributor.author | I. H. Choi | - |
dc.contributor.author | C. W. Lee | - |
dc.contributor.author | Min Suk-Ki | - |
dc.date.accessioned | 2024-02-21T05:12:54Z | - |
dc.date.available | 2024-02-21T05:12:54Z | - |
dc.date.issued | 1993-01 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/148978 | - |
dc.title | Atomic force microscopic observation in the surface morphologies and roughness of plasma deposited tungsten and tungsten nitride thin films. | - |
dc.title.alternative | Atomic force microscopic observation in the surface morphologies and roughness of plasma deposited tungsten and tungsten nitride thin films. | - |
dc.type | Book | - |
dc.citation.startPage | ? | - |
dc.citation.endPage | ? | - |
dc.relation.isPartOfSeries | 한국물리학회 제 67 회 학술논문 발표회 | - |
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